Nanoscale mapping of in situ actuating microelectromechanical systems with AFM
作者: Manuel RivasVarun VyasAliya CarterJames VeronickYusuf KhanOleg V. KolosovRonald G. PolcawichBryan D. Huey
作者单位: 1* Department of Materials Science and Engineering, University of Connecticut, Storrs, Connecticut 06269, USA
2 Department of Orthopaedic Surgery , University of Connecticut Health Center , Farmington , Connecticut 06030 , USA
3 Department of Physics , Lancaster University , Lancaster LA1 4YB , UK
4 § US Army Research Laboratory , Micro and Nano Electronic Materials and Devices Branch , Adelphi , Maryland 20783 , USA
5 Department of Materials Science and Engineering , University of Connecticut , Storrs , Connecticut 06269 , USA
刊名: Journal of Materials Research, 2015, Vol.30 (3), pp.429-441
来源数据库: Cambridge University Press Journal
DOI: 10.1557/jmr.2014.353
原始语种摘要: Microelectromechanical systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in situ. Atomic force microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored – including mapping resonances of the driving microcantilever and the displacement of an...
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关键词翻译
关键词翻译
  • actuating 开动
  • increasingly 愈加
  • their 他们的
  • mapping 映象
  • systems 系统科学与软件
  • AFM Amplitude-Frequency Modulation
  • especially 特别地
  • driving 传动的
  • dynamic 动力学的
  • well