Preliminary results of optical emission spectroscopy by line ratio method in the RF negative ion source at ASIPP
作者: Yan WANGZhimin LIULizhen LIANGChundong HU
作者单位: 1Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, People’s Republic of China
2University of Science and Technology of China, Hefei 230026, People’s Republic of China
刊名: Plasma Science and Technology, 2019, Vol.21 (4)
来源数据库: Institute of Physics Journal
DOI: 10.1088/2058-6272/aaf592
原始语种摘要: Optical emission spectroscopy (OES) using the trace rare gases of Ar and Xe have been carried out in a radio frequency (RF) driven negative ion source at Institute of Plasma Physics, Chinese Academy of Science (ASIPP), in order to determine the electron temperature and density of the hydrogen plasma. The line-ratio methods based on population models are applied to describe the radiation process of the excited state particles and establish their relations with the plasma parameters. The spectral lines from the argon and xenon excited state atoms with the wavelength of 750.4 and 828.0 nm are used to calculate the electron temperature based on the corona model. The argon ions emission lines with the wavelength of 480 and 488 nm are selected to calculate the electron density based on the...
全文获取路径: IOP  (合作)
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关键词翻译
关键词翻译
  • source 
  • optical 光学的
  • parameters 参数
  • excited 激发的
  • calculate 计算
  • negative 负象
  • electron 电子
  • method 方法
  • temperature 温度
  • emission 发射