Photoluminescence and secondary ion mass spectrometry investigation of unintentional doping in epitaxial germanium thin films grown on III-V compound by metal-organic chemical vapor deposition
作者: Yu Bai Mayank T. Bulsara Eugene A. Fitzgerald
刊名: Journal of Applied Physics, 2012, Vol.111 (1), pp.013502
来源数据库: CrossRef期刊
DOI: 10.1063/1.3673538
全文获取路径: CrossRef 
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关键词翻译
关键词翻译
  • grown 生长
  • investigation 研究
  • epitaxial 外延
  • deposition 沉积
  • germanium 
  • vapor 
  • doping 掺杂
  • spectrometry 光谱测定
  • films 薄膜
  • unintentional 无意