Measurement of microsurface topography using a self-mixing optical configuration
作者: Xiaohong SunHan WangBin LiuYanguang Yu
作者单位: 1University of Wollongong
2Zhengzhou University
刊名: Optical Engineering, 2018, Vol.57 (5), pp.051503-051503
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.57.5.051503
关键词: Microsurface topographySelf-mixing interferenceOptical feedbackThree-dimensional reconstruction
原始语种摘要: This work proposes to measure the topography of microstructure surfaces using a self-mixing interference (SMI) configuration. The theoretical measurement model is built using beam-expanded plane wave method and considering SMI effect. The interference patterns for different objects are obtained based on the presented model. In addition, an algorithm for reconstructing the three-dimensional surface is implemented and applied onto an object with spherical surface. The presented work shows the potential application for topography measurement using a compact SMI configuration.
全文获取路径: SPIE  (合作)
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关键词翻译
关键词翻译
  • topography 地形学
  • configuration 配置
  • mixing 混合
  • interference 干涉
  • measurement 测量
  • dimensional 量纲的
  • SMI Structure for Management Information
  • reconstruction 复原
  • compact 紧的
  • microstructure 微结构