Experimental investigations on characterization of freeform wavefront using Shack–Hartmann sensor
作者: Dali Ramu BuradaKamal K. PantMohamed BichraGufran Sayeed KhanStefan SinzingerChandra Shakher
作者单位: 1Indian Institute of Technology Delhi
2Technische Universität Ilmenau
刊名: Optical Engineering, 2017, Vol.56 (8), pp.084107-084107
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.56.8.084107
关键词: scanning Shack–Hartmann sensorsubaperture stitchingfreeform opticsnull diffractive optical element
原始语种摘要: The metrology of freeform wavefront can be performed by the use of a noninterferometric method, such as a Shack–Hartmann sensor (SHS). Detailed experimental investigations employing an SHS as metrology head are presented. The scheme is of nonnull nature where small subapertures are measured using an SHS and stitched to give the full wavefront. For the assessment of complex misalignment errors during the spiral scanning, a library of residual slope errors has been created, which makes the alignment process fast converging for minimizing the scanning errors. A detailed analysis of the effects of slope and positioning error on reproducibility is presented. It is validated by null test where a null diffractive optical element has been used in a Mach–Zehnder configuration for compensating the...
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关键词翻译
关键词翻译
  • 度量衡学 错帐
  • wavefront 波前
  • sensor 感受器
  • aspheric 非球面
  • stitching 缝合
  • SHS 自蔓延高温合成
  • errors 错帐
  • metrology 错帐
  • agreement 协议
  • scanning 扫描
  • diffractive 绕射的