Swing arm profilometer: high accuracy testing for large reaction-bonded silicon carbide optics with a capacitive probe
作者: Ling XiongXiao LuoHai-xiang HuZhi-yu ZhangFeng ZhangLi-gong ZhengXue-jun Zhang
作者单位: 1Changchun Institute of Optics, Fine Mechanics and Physics
2University of Chinese Academy of Sciences
刊名: Optical Engineering, 2017, Vol.56 (8), pp.084101-084101
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.56.8.084101
关键词: surface testprofilometercalibrationground phase
原始语种摘要: A feasible way to improve the manufacturing efficiency of large reaction-bonded silicon carbide optics is to increase the processing accuracy in the ground stage before polishing, which requires high accuracy metrology. A swing arm profilometer (SAP) has been used to measure large optics during the ground stage. A method has been developed for improving the measurement accuracy of SAP using a capacitive probe and implementing calibrations. The experimental result compared with the interferometer test shows the accuracy of 0.068 μ m in root-mean-square (RMS) and maps in 37 low-order Zernike terms show accuracy of 0.048 μ m RMS, which shows a powerful capability to provide a major input in high-precision grinding.
全文获取路径: SPIE  (合作)
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关键词翻译
关键词翻译
  • 保税 反酌
  • capacitive 电容的
  • accuracy 准确度
  • profilometer 表面光洁度仪
  • probe 探针
  • large 大的
  • silicon 
  • optics 光学
  • carbide 碳化钙
  • reaction 反酌
  • bonded 反酌