Optical lithography of three-dimensional magnetophotonic microdevices
作者: Dam Thuy Trang NguyenOlivia Del GuercioThi Huong AuDuc Thien TrinhNguyen Phuong Thao MaiNgoc Diep Lai
作者单位: 1Université Paris-Saclay
2Hanoi National University of Education
刊名: Optical Engineering, 2018, Vol.57 (4), pp.041406-041406
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.57.4.041406
关键词: Micromechanical devicesMagnetophotonic devicesDirect laser writingOne-photon absorption
原始语种摘要: We have recently demonstrated a simple and low-cost fabrication technique, called low one-photon absorption direct laser writing, to realize desired polymeric microstructures. We present the use of this technique for fabrication of three-dimensional magnetophotonic devices on a photocurable homogeneous nanocomposite consisting of magnetite (Fe3O4) nanoparticles and a commercial SU8 photoresist. The fabricated magnetophotonic microstructures show strong response to an applied external magnetic field. Thus, various three-dimensional submicromechanical magnetophotonic devices, which can be mechanically driven by magnetic force, are designed and created. Potential applications of these devices are also discussed.
全文获取路径: SPIE  (合作)

  • lithography 石版印刷
  • mechanically 用机械
  • fabrication 制造
  • dimensional 量纲的
  • three 
  • writing 记录
  • magnetite 磁铁矿
  • absorption 吸收
  • fabricated 制造
  • desired 预期