Environmental stability investigation on electron-beam deposited coatings with dense capping layer
作者: Tingting ZengMeiping ZhuYingjie ChaiRongjun ZhangHuasong LiuChaoyi YinNuo XuYuanan ZhaoJianda Shao
作者单位: 1Chinese Academy of Sciences
2University of Chinese Academy of Sciences
3University of Central Florida
4Fudan University
5Tianjin Jinhang Technical Physics Institute
刊名: Optical Engineering, 2018, Vol.57 (8), pp.086114-086114
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.57.8.086114
关键词: Environmental stabilityE-beam coatingsPlasma ion assisted deposition capping layerLaser resistance
原始语种摘要: The properties of coatings deposited by electron-beam (e-beam) technique can be easily influenced by environmental humidity, causing spectrum shift, residual stress evolution, and wave front errors. HfO2 / SiO2 multilayer coatings with different overcoat layer deposition parameters have been prepared. The optical spectrum shifts induced by atmosphere-vacuum effect are investigated by a spectrometer. The laser resistance is studied and their damage morphologies are characterized by a scanning electron microscope. The surface morphologies and the global mechanical stresses of the films are analyzed by an atomic force microscope and zygo interferometer, respectively. The experimental results demonstrate that by introducing a dense capping SiO2 layer employed...
全文获取路径: SPIE  (合作)
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关键词翻译
关键词翻译
  • investigation 研究
  • layer 
  • stability 稳定性
  • electron 电子
  • deposition 沉积
  • dense 致密的
  • capping 复盖岩层
  • parameters 参数
  • assisted 辅助的
  • induced 感应的