Demodulation phase angle compensation for quadrature error in decoupled dual-mass MEMS gyroscope
作者: Jia JiaXukai DingYang GaoHongsheng Li
作者单位: 1Southeast University
2Ministry of Education
刊名: Journal of Micro/Nanolithography, MEMS, and MOEMS, 2018, Vol.17 (3), pp.035001-035001
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.JMM.17.3.035001
关键词: Dual-mass MEMS gyroscopeSmall frequency splitLow-quality factorOptimal demodulation phase angleScale factorBias stability
原始语种摘要: This paper proposes a demodulation phase angle compensation (DPAC) for dual-mass MEMS gyroscopes with small frequency split (Δω) and low-quality factor ( Q value), to reduce the quadrature interference on Coriolis signal output. The harmful contribution of quadrature error and demodulation phase angle drift to the gyroscope performances is analyzed and quantified. The quadrature stiffness correction (QSC) system based on DPAC is redesigned, and it was analyzed that the QSC would reduce the Δω and then affect the performances of the gyroscope. Wherein, the DPAC algorithm is implemented by a back propagation neural network. Finally, the experiments are arranged to verify the theoretical analysis. DPAC experiments were performed for both open-loop detection method and QSC method,...
全文获取路径: SPIE 

  • angle 
  • gyroscope 陀螺频率
  • proved 证实储量
  • demodulation 解调
  • quadrature 90 度相移
  • compensation 补偿
  • factor 因素
  • error 误差
  • scale 度盘
  • stability 稳定性