Surface shape measurement of transparent planar elements with phase measuring deflectometry
作者: Ruiyang WangDahai LiLei LiKaiyuan XuLei TangPengyu ChenQionghua Wang
作者单位: 1Sichuan University
2China Academy of Engineering Physics
刊名: Optical Engineering, 2018, Vol.57 (10), pp.104104-104104
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/1.OE.57.10.104104
关键词: Surface shape measurementPlanar elementParasitic reflectionPhase measuring deflectometry
原始语种摘要: Phase measuring deflectometry (PMD) with structured light projection and phase-shifting technique is a highly accurate optical surface measuring method based on the law of reflection. Generally, for surface shape measurement of transparent planar elements, PMD suffers from parasitic reflection. To avoid the unexpected effect of parasitic reflection, a method based on fringe frequency tuning and Fourier-transform is introduced. Numerical simulations and experiments are both conducted to evaluate the performance of the proposed method. Experiment results are shown. Surface figures measured using the proposed method are compared with those measured using traditional phase-shifting algorithm and Fizeau interferometer. Both an optical planar element with a thickness of 24.5 mm and a planar...
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  • transparent 透媚
  • shape 形状
  • measuring 测量
  • measurement 测量
  • element 元素
  • accurate 精确的
  • optical 光学的
  • projection 投射
  • shifting 移位
  • reflection 反射