A modified numerical method for the accurate calculation of molecular flow transmission probabilities and density distributions of cylindrical tubes
作者: Yanwu LiXuekang ChenXiaohang BaiQinglun CheYajuan Li
作者单位: 1National Key Laboratory of Science and Technology on Surface Engineering, Lanzhou Institute of Physics, P. O. Box 94, Lanzhou, Gansu 730000, PR China
刊名: Vacuum, 2013, Vol.97 , pp.60-64
来源数据库: Elsevier Journal
DOI: 10.1016/j.vacuum.2013.04.003
关键词: Numerical methodMolecular flowTransmission probabilityCylindrical tubeMonte Carlo
英文摘要: Abstract(#br)Accurate numerical calculations of molecular flow transmission probabilities and density distributions of tubes are important to the benchmark problems of Monte Carlo solutions, dynamic expansion vacuum gauge calibration systems, and molecular beam formation studies. Although Nawyn and Meyer [published by van Essen and Heerens. J Vac Sci Technol 1976; 13:1183] have solved cylindrical tube problems by using the numerical method based on Clausing's equations, perhaps the calculated results still lack sufficient accuracy. In this paper, we propose a modified method that could achieve calculation accuracies of transmission probabilities as high as 10 −11 –10 −13 in the range of L ′/ R ≤ 100 (where L ′ is the tube length, R is the tube radius), which are more accurate than the...
全文获取路径: Elsevier  (合作)
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影响因子:1.53 (2012)

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