Study on laser annealing of niobium films deposited on copper for RF superconducting cavities
[ 2 ]王建军,等.射频超导腔用铜上沉积铌膜的激光退火研究[ J ] .激光,2003 ( 4 ):2 - 3 .
作者: Yujia YangXiangyang LuWeiwei TanLi XiaoLiang ZhuDatao Xie
作者单位: 1Institute of Heavy Ion Physics, Peking University, Beijing 100871, China
2China Ship Development and Design Center, Wuhan 430060, China
刊名: Nuclear Inst. and Methods in Physics Research, A, 2020, Vol.964
来源数据库: Elsevier Journal
DOI: 10.1016/j.nima.2020.163803
关键词: Superconducting cavityLaser annealingNiobium thin filmRecrystallizationSurface topographySurface roughness
原始语种摘要: Abstract(#br)Niobium sputtered copper cavities were proposed as a kind of promising next generation superconducting cavities, but were still challenged by the Q-slope effect under high acceleration gradients. Current solutions focus on improving the film quality to make it more bulk-like, for which a higher substrate temperature is required. However, due to the limitation of the melting point of the copper substrate, both the deposition process and the post-annealing process cannot be performed at a high temperature. The laser annealing mentioned in this paper uses nanosecond pulsed laser as the heat source, and the local temperature field generated within the thickness scale of the niobium film can anneal the film without affecting copper substrate. Laser annealing system has been set up...
全文获取路径: Elsevier  (合作)

  • copper 
  • niobium 
  • laser 激光
  • substrate 基质
  • topography 地形学
  • films 薄膜
  • annealing 热处理
  • temperature 温度
  • nanosecond 毫微秒
  • effectiveness 有效性