An apparatus for combined vapor deposition and ion implantation to modify the surface properties of metals
作者: Margesin B.Giacomozzi F.Guzman L.Lazzari G.Zanini V.
刊名: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1987, Vol.21 (1), pp.566-569
来源数据库: Elsevier Journal
DOI: 10.1016/0168-583X(87)90905-0
全文获取路径: Elsevier  (合作)

  • apparatus 仪器频
  • deposition 沉积
  • vapor 
  • properties 道具
  • modify 修正
  • surface 
  • combined 组合
  • implantation 离子注入