Structural investigation of Al2O3 formed by ion implantation at various doses
作者: Pawar P.S.Kothari D.C.Narsale A.M.Raole P.M.Gogawale S.V.Guzman L.Girardi S.Dapor M.Anderle M.Canteri R.
刊名: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989, Vol.39 (1), pp.670-674
来源数据库: Elsevier Journal
DOI: 10.1016/0168-583X(89)90871-9
全文获取路径: Elsevier  (合作)

  • investigation 研究
  • implantation 离子注入
  • formed 丰满型船
  • various 千变万化的