Geometry-on-demand fabrication of conductive microstructures by photoetching and application in hemostasis assessment
光刻法制备导电微结构及其在止血评价中的应用
作者: Libing DuanXinjun LvQian HeXiangyang JiMiao SunYajie YangZhenming JiYanbo Xie
作者单位: 1MOE Key Laboratory of Material Physics and Chemistry under Extraordinary Conditions, School of Physical Science and Technology, Northwestern Polytechnical University, Xi'an, 710072, China
2Department of Clinical Laboratory, The Second Affiliated Hospital of Xi'an Jiaotong University, Xi'an, 710004, China
刊名: Biosensors and Bioelectronics, 2020, Vol.150
来源数据库: Elsevier Journal
DOI: 10.1016/j.bios.2019.111886
关键词: PhotoetchingZnOLow cost fabricationElectrochemical impedanceBiosensingAssessment of hemostasis
英文摘要: Abstract(#br)Photo-corrosion is a common phenomenon observed in the photocatalytic semiconductor materials, which can seriously harm the photoelectric properties and performances in the energy applications. However, in this paper, we demonstrated that the photo-corrosion effects can be used for the microfabrication of conductive structures on a photocatalytic film like zinc oxide (ZnO), named as “photoetching”. Our results demonstrated that microstructures can be prepared within seconds with a precision at an order of tens of micrometers using our current devices. Different from the previous work, the etching process was achieved free of conducting layer under the ZnO film, avoiding the short-circuit of the conductive micro-patterns and enabling the use for the impedance sensing. We...
全文获取路径: Elsevier  (合作)
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来源刊物:
影响因子:5.437 (2012)

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关键词翻译
关键词翻译
  • photoetching 光刻蚀
  • fabrication 制造
  • conductive 导电的
  • demand 需用电力
  • application 申请
  • assessment 评价
  • hemostasis 止血