A mems variable optical attenuator based on a vertical comb drive with self-elevated stators
作者: J. ChengW. LiuQ. ChenN. XuQ. SunY. LiuW. WangH. Xie
作者单位: 1School of Optoelectronic Engineering, Xi’an Technological University, Shaanxi, China
2Wuxi WiO Technology Co., Ltd, Jiangsu, China
3Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA
刊名: Sensors & Actuators: A. Physical, 2018, Vol.271 , pp.398-408
来源数据库: Elsevier Journal
DOI: 10.1016/j.sna.2017.11.043
关键词: Vertical comb driveSelf-aligned vertical comb driveMicromirrorVoaBimorphMicroactuator
原始语种摘要: Abstract(#br)Vertical comb drives are critical for electrostatic optical switches and variable optical attenuators (VOAs), but fabricating vertical comb drives requires the formation of two levels of comb fingers and thus suffers from the difficulty of dealing with the comb-finger alignment. This paper presents a vertical comb drive design and its micro-fabrication method that can realize self-aligned two-level comb fingers. The self-aligned vertical comb fingers are enabled by a novel vertically-elevated flat-end (VEFE) bimorph structure. Both the stator and rotor fingers of the vertical comb drive are formed by the same photomask and the same silicon etching step, which automatically ensures accurate alignment of the stator and rotor fingers. The vertical separation between the stator...
全文获取路径: Elsevier  (合作)
影响因子:1.841 (2012)

  • vertical 垂线
  • drive 驱动
  • fingers 指粒
  • optical 光学的
  • rotor 转子
  • achieved 获得的
  • mirror 
  • attenuator 衰减器
  • range 射程
  • stator 定子