Design and fabrication of 1300-line/mm polarization-independent reflection gratings for spectral beam combining
作者: Xinyu MaoChaoming LiKeqiang QiuLijiang ZengLifeng LiXinrong ChenJianhong WuZhengkun LiuShaojun FuYilin Hong
作者单位: 1Department of Precision Instrument, Tsinghua University, Beijing 100084, China
2School of Optoelectronic Science and Engineering & Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215006, China
3National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
刊名: Optics Communications, 2020, Vol.458
来源数据库: Elsevier Journal
DOI: 10.1016/j.optcom.2019.124883
关键词: Polarization-independent gratingSpectral beam combiningDiffractive optics
原始语种摘要: Abstract(#br)We designed and fabricated polarization-independent multilayer dielectric reflection gratings of 1300 line/mm for spectral beam combining. Because the designed grating has a duty cycle (or fill factor) much greater than 0.5, we used the lift-off process to invert a less-than-0.5 duty cycle photoresist mask to a greater-than-0.5 duty cycle chromium mask. Because the simultaneous polarization-independence and high-angular-dispersion requirements greatly reduce fabrication tolerance, we employed the end-point detection techniques to control accurately the duty cycle and groove depth of the grating profile to reach the design target. The measured polarization-averaged diffraction efficiency of the fabricated gratings was greater than 97% in the wavelength range of 1050 nm–1080 nm.
全文获取路径: Elsevier  (合作)
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影响因子:1.438 (2012)

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关键词翻译
关键词翻译
  • 较大 制造
  • polarization 极化
  • combining 组合
  • spectral 谱的
  • grating 筛分
  • fabrication 制造
  • independent 独立的
  • reflection 反射
  • fabricated 制造
  • greater 制造
  • independence 独立性