Calculation of Elemental Composition Distribution of Multicomponent Metallic Coatings Deposited onto Inner Surfaces of Low Diameter Pipes
作者: Yu. O. Kosminska, V. I. Perekrestov, G. S. Kornyushchenko
作者单位: 1Sumy State University, 2 Rymsky-Korsakov Str., UA-40007 Sumy, Ukraine
刊名: Metallofiz. Noveishie Tekhnol., 2019, Vol.41 (6), pp.733-749
来源数据库: G.V. Kurdyumov Institute for Metal Physics, National Academy of Science of the Ukraine
DOI: 10.15407/mfint.41.06.0733
关键词: Magnetron sputteringMole fractionHollow cathodeComposite targetMathematical model of mass transfer.
原始语种摘要: A sputtering device for deposition of multicomponent high-entropy metallic coatings with increased protective properties is proposed. The device is based on magnetron sputtering and hollow cathode effect with the sputtering target in the form of a composite rod. Application of the sputterer includes deposition of coatings onto the inner surface of low diameter pipes (above 4 cm). In the present work, a mathematical model is developed for the sputterer that describes mass transfer of the sputtered material and allows calculating mole fraction distribution of the coating components depending on the surface coordinates, composite rod-like target configuration, and geometrical parameters of the main construction elements as well. Formulation of the model starts with consideration of the...
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关键词翻译
关键词翻译
  • sputterer 溅射反应器
  • sputtering 溅射
  • fraction 分数
  • cathode 阴极
  • deposition 沉积
  • device 装置
  • distribution 分布
  • metallic 金属的
  • scattering 散射
  • entropy 平均信息量