Investigation of structural and optical anisotropy of m -plane InN films grown on γ-LiAlO<sub>2</sub>(1 0 0) by metal organic chemical vapour deposition
作者: Fu, DZhang, RLiu, BXie, Z LXiu, X QGu, S LLu, HZheng, Y DChen, Y HWang, Z G
刊名: Journal of Physics D: Applied Physics, 2011, Vol.44 (24), pp.245402-245406
来源数据库: Ingentaconnect期刊
DOI: 10.1088/0022-3727/44/24/245402
原始语种摘要: In this paper a systematic investigation of structural and optical anisotropy of m -plane InN film grown on γ-LiAlO2(1 0 0) substrate by metal organic chemical vapour deposition, which is believed to be much more difficult than molecular beam epitaxy, is presented.The InN film showed pure m -plane phase as confirmed by x-ray diffraction ω/2 scan together with polarized Raman spectroscopy. The epitaxial relationship between the m -plane InN and the substrate was found to be [0 0 0 1]InN ∥ [0 1 0]LAOand [1 1 − 2 0]InN ∥ [0 0 1]LAO. The inherent film mosaic anisotropy was studied by x-ray rocking curve analysis. Atomic force microscopy revealed that stripe-like features appear on the surface of the m -plane InN film, which originated...
全文获取路径: IntechOpen 
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影响因子:2.528 (2012)

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关键词翻译
关键词翻译
  • sub 分段
  • grown 生长
  • plane 平面
  • structural 构造
  • deposition 沉积
  • vapour 蒸汽
  • anisotropy 蛤异性
  • optical 光学的
  • organic 有机的
  • films 薄膜