Analyzing the applicability of miniature ultra-high sensitivity Fabry–Perot acoustic sensor using a nanothick graphene diaphragm
作者: Li, ChengGao, XiangyangGuo, TingtingXiao, JunFan, ShangchunJin, Wei
刊名: Measurement Science and Technology, 2015, Vol.26 (8), pp.85101-85107
来源数据库: Ingentaconnect期刊
DOI: 10.1088/0957-0233/26/8/085101
原始语种摘要: A miniature Fabry–Perot interferometric acoustic sensor with an ultra-high pressure sensitivity was constructed by using approximately 13 layers of graphene film as the diaphragm. The extremely thin diaphragm was transferred onto the endface of a ferrule, which had an inner diameterof 125 μ m, and van der Waals interactions between the graphene diaphragm and its substrate created a low finesse Fabry–Perot interferometer with a cavity length of 98 μ m. Acoustic testing demonstrated a pressure-induced deflection of 2380 nm kPa−1and a noise equivalent acoustic signal level of ~2.7 mPa/Hz1/2 for a 3 dB bandwidth with a center frequency of 15 kHz. The sensor also exhibited a dynamic frequency response between 1 and 20 kHz, which conformed well to the result obtained by a...
全文获取路径: IntechOpen 
影响因子:1.435 (2012)

  • diaphragm 横隔膜
  • miniature 小型的
  • acoustic 声的
  • sensor 感受器
  • finesse 锐度
  • ultra 
  • applicability 适用性
  • sensitivity 灵敏度
  • suspended 悬浮
  • cavity