Design and Fabrication of Temperature Sensor for Weather Monitoring System using MEMS Technology
作者: Veeramani PVimala Juliet ASam Jebakumar JJagadish R
刊名: Oriental Journal of Chemistry, 2018, Vol.34 (5)
来源数据库: Material Science Research India
DOI: 10.13005/ojc/340537
关键词: MEMSRadiosondeTemperature Sensor
原始语种摘要: In this paper, Micro Electro Mechanical System (MEMS) based temperature sensor is designed and fabricated for weather monitoring system at troposphere level. In this design we have used meander shape, because it is easy to vary the length. We have optimized the length in this design. Due to certain advantages like low cost, easily available, high melting and boiling point, molybdenum material is used for fabrication of this design. The four meander type temperature sensors are designed with various dimensions of sizes in 6.7mm×4mm, 9.5mm×4mm, 5.2mm×4mm, 6.5mm×4mm. The Temperature Coefficient of Resistance (TCR) values for four various sensors mentioned above are 3.4 ×10-4 C-1, 3.7×10-4 C-1, 7.0×10-4 C-1, 7.5×10-4 C-1. For radiosonde applications the sensor must have high sensitivity, high...
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  • values 价值观
  • Temperature 温度
  • above 在上面
  • various 千变万化的
  • easily 容易地
  • dimensions 面积
  • level 水准
  • temperature 温度
  • design 设计
  • meander 曲流河曲