Nanometric displacement measurement based on interference fringes deflection
作者: Hely González-RiveraG. E. Sandoval-Romero
作者单位: 1Centro de Ciencias Aplicadas y Desarrollo Tecnológico, Universidad Nacional Autónoma de México , Apartado Postal 70-186, Coyoacán, Ciudad de México 04510 , México
刊名: Vibroengineering PROCEDIA, 2017, Vol.11 , pp.140-144
来源数据库: JVE International Ltd
DOI: 10.21595/vp.2017.18441
关键词: nanometric displacementbeam deflection sensinginterferencesmall vibrations
原始语种摘要: A hybrid method to obtain nanometric displacements based on interference fringes movement by optical beam deflection is proposed. A proof-of-principle experiment is described as a new method for real-time detection and measurement of small vibrations, experimental results shows an increase in the resolution compared with a simply optical beam deflection read out. Also, there is minimum detectable displacement in an assumed noise environment.
全文获取路径: JVE 
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关键词翻译
关键词翻译
  • deflection 偏转
  • displacement 迁移
  • measurement 测量
  • interference 干涉
  • assumed 假定的
  • optical 光学的
  • principle 原理
  • experiment 实验
  • based 基于
  • proof 证明