MEMS Resonator‐Based Insulated Voltage Sensor Withstanding Higher Voltage
作者: YUUKI WADANAOKI NOBUNAGASHINYA KUMAGAIHIROKI ISHIHARAMAKOTO ISHIIMINORU SASAKI
作者单位: 1Toyota Technological Institute Japan
2 Yazaki Corporation Research and Technology Center Japan
刊名: Electrical Engineering in Japan, 2018, Vol.203 (1), pp.58-64
来源数据库: Wiley Journal
DOI: 10.1002/eej.23065
关键词: MEMS resonatorresonant frequencyisolationvoltage sensor
原始语种摘要: SUMMARY(#br)The Si resonator is applied for measuring the voltage in a highly isolated manner. The working principle is based on the resonant frequency shift caused by the electrical field from the electrode connected to the high‐voltage source (supposing the battery). Here, the resonator is electrically floated, and its potential is decided by the relative position against the electrodes which are connected to the high voltage and the driving voltage. The induced voltage on the resonator is analyzed against the driving frequency. The resonance is found by the paired peaks in the amplitude curve. The setup for the electrical measurement can make the sensor system compact. A new sensor design for avoiding the electrical field concentration realizes the measurement over 400 V without the...
全文获取路径: Wiley  (合作)
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关键词翻译
关键词翻译
  • electrical 电的
  • driving 传动的
  • system 
  • resonator 共振器
  • measuring 测量
  • voltage 电压
  • measurement 测量
  • breakdown 故障
  • floated 浮动的
  • connected 连通的