Spherical pinch x-ray generator prototype for microlithography
作者: Kenji KawaiEmilio PanarellaD. Mostacci
作者单位: Advanced Laser and Fusion Technology, Inc. (Canada)
论文集英文名称: Other Conferences
来源数据库: SPIE-the International Society for Optical Engineering
DOI: 10.1117/12.47366
原始语种摘要: A new type of plasma x-ray source has been developed by applying the spherical pinch concept of imploding shock waves to produce a dense plasma hot enough to emit soft x-rays. Very intense x-rays in a few keV energy (5-10 angstroms) is radiated from a small plasma volume as microsecond pulses. SPX II is a prototype machine designed to demonstrate the engineering feasibility of the spherical pinch scheme. It is expected to generate at least 10 mJ/cm2 of usable soft x-rays for microlithography.
全文获取路径: SPIE  (合作)
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关键词翻译
关键词翻译
  • prototype 原型
  • generator 振荡器发生器
  • pinch 箍缩
  • demonstrate 说明
  • machine 机器
  • spherical 球的
  • usable 可用
  • microsecond 微秒
  • plasma 深绿玉髓
  • radiated 放射状