作者: | H. Sugimura, N. Nakagiri |
作者单位: |
1Tsukuba Research Laboratory, Nikon Co., 5-9-1 Tokodai, Tsukuba 300-26, Japan |
刊名: | Applied Physics A Materials Science & Processing, 1998, Vol.66 (1), pp.S427-S430 |
来源数据库: | Springer Journal |
DOI: | 10.1007/s003390051176 |
关键词: | PACS: 82.65.-i; 82.80.-d; 68.60.-p; |