The effects of optical and material properties on designing of a photonic crystal mechanical sensor
作者: Longqiu LiTianlong LiFengtong JiWenping SongGuangyu ZhangYao Li
作者单位: 1Harbin Institute of Technology
刊名: Microsystem Technologies, 2017, Vol.23 (8), pp.3271-3280
来源数据库: Springer Journal
DOI: 10.1007/s00542-016-3186-7
关键词: Photonic CrystalWavelength ShiftFinite Difference Time DomainResonant WavelengthMechanical Sensor
英文摘要: Photonic crystal nanocavities, which can be used to localize electromagnetic fields in a low refractive index region, hold great promise in fabricating micromechanical sensors for their potential applications in physical, chemical and biological engineering. In this paper, effects of optical and material properties on the performance of three different types of photonic crystal based mechanical sensors, i.e., force, displacement, and strain sensors, are investigated. The microcantilevers of sensors are made in Si and Si/SiO2 and exhibited in air and water atmosphere. As we found, both the resonant wavelength and the resonant wavelength shift for microcantilever mechanical sensors exhibit a linear relationship to the signal detection parameters (i.e., force, displacement, and...
原始语种摘要: Photonic crystal nanocavities, which can be used to localize electromagnetic fields in a low refractive index region, hold great promise in fabricating micromechanical sensors for their potential applications in physical, chemical and biological engineering. In this paper, effects of optical and material properties on the performance of three different types of photonic crystal based mechanical sensors, i.e., force, displacement, and strain sensors, are investigated. The microcantilevers of sensors are made in Si and Si/SiO2 and exhibited in air and water atmosphere. As we found, both the resonant wavelength and the resonant wavelength shift for microcantilever mechanical sensors exhibit a linear relationship to the signal detection parameters (i.e., force, displacement, and...
全文获取路径: Springer  (合作)
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来源刊物:
影响因子:0.827 (2012)

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关键词翻译
关键词翻译
  • effects 海员自身物品
  • properties 道具
  • material 充填料
  • mechanical 机械的
  • crystal 晶体
  • sensor 感受器
  • higher 
  • vertical 垂线
  • optical 光学的
  • relationship 关系