Design and fabrication of micro-channels based fluid viscosity sensor
作者: Sandeep AryaVandana SharmaS. L. Shimi
作者单位: 1University of Jammu
2Government College of Engineering and Technology
3National Institute of Technical Teacher’s Training and Research
刊名: ISSS Journal of Micro and Smart Systems, 2017, Vol.6 (2), pp.119-125
来源数据库: Springer Journal
DOI: 10.1007/s41683-017-0012-0
关键词: Micro-channelMicro-cantileverFluid sensorLithographyPDMS
英文摘要: This paper presents the design and fabrication of polydimethylsiloxane (PDMS) based microfluidic channel integrated with piezoelectric micro-cantilever as fluid sensor. A finite element analysis is carried out to simulate fluid–structure interaction and estimate cantilever deflection under different fluidic flows at constant flow rate. The design of device is based on the material selection as well as determination of geometrical dimensions. In this proposed work, a piezoelectric material is selected for micro-cantilever beam on the silicon substrate. The micro-channel is fabricated from SU8 mould and the material selected for channel is PDMS. Fabrication was done by considering systematic steps toward optimization of shape and geometry involving soft lithography process. The results...
原始语种摘要: This paper presents the design and fabrication of polydimethylsiloxane (PDMS) based microfluidic channel integrated with piezoelectric micro-cantilever as fluid sensor. A finite element analysis is carried out to simulate fluid–structure interaction and estimate cantilever deflection under different fluidic flows at constant flow rate. The design of device is based on the material selection as well as determination of geometrical dimensions. In this proposed work, a piezoelectric material is selected for micro-cantilever beam on the silicon substrate. The micro-channel is fabricated from SU8 mould and the material selected for channel is PDMS. Fabrication was done by considering systematic steps toward optimization of shape and geometry involving soft lithography process. The results...
全文获取路径: Springer  (合作)
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关键词翻译
关键词翻译
  • fabrication 制造
  • sensor 感受器
  • fabricated 制造
  • micro 
  • PDMS Program Development and Maintenance System
  • device 装置
  • cantilever 悬臂支架
  • lithography 石版印刷
  • fluid 
  • silicon