A design method and its CAD prototype system for surface micromachined MEMS devices
作者: Changfu ZhangKang YunPeiyong ChengHaihong Ai
作者单位: 1School of Mechatronic Engineering, Xi’an Technological University
刊名: Microsystem Technologies, 2018, Vol.24 (7), pp.3075-3084
来源数据库: Springer Nature Journal
DOI: 10.1007/s00542-018-3795-4
原始语种摘要: Abstract(#br)Now the MEMS design method of “bottom–up” (mask-to-shape-to-function) has been adopted widely. However, it is complicated, time-consuming and not straightforward and can’t meet the demand of MEMS development. In this paper, a 3D MEMS aided design method is studied for surface micromachined MEMS devices, which adopts the design procedure of function-to-shape-to-mask. With this method, 3D geometric models of surface micromachined MEMS devices are built by selecting 3D MEMS features from the developed feature database after functional requirement analysis and concept design have been made. After the geometric model is analyzed with FEM analysis tools, 2D candidate masks and process flow are automatically generated by analyzing geometric information and material information of...
全文获取路径: Springer Nature  (合作)
影响因子:0.827 (2012)