MEMS-based Ni–B probe with enhanced mechanical properties for fine pitch testing
作者: Kyongtae KimHong-Beom KwonHye-Rin AhnYong-Jun Kim
作者单位: 1School of Mechanical Engineering, Yonsei University
刊名: Micro and Nano Systems Letters, 2017, Vol.5 (1), pp.1-5
来源数据库: Springer Journal
DOI: 10.1186/s40486-016-0039-1
关键词: Ni–B micro-probeNi–Co micro-probeContact forceDeformation
英文摘要: Abstract(#br)We fabricated and characterized microelectromechanical systems (MEMS)-based Ni–B probes with enhanced mechanical properties for fine pitch testing. The Ni–B micro-probes were compared with conventional Ni–Co micro-probes in terms of the mechanical performance and thermal effect. The elastic modulus and hardness of Ni–B were found to be 240.4 and 10.9 GPa, respectively, which surpass those of Ni–Co. The Ni–B micro-probes had a higher contact force than the Ni–Co micro-probes by an average of 41.38% owing to the higher elastic modulus. The Ni–B micro-probes had a lower average permanent deformation than the Ni–Co micro-probes after the same overdrive was applied for 1 h by 56.58 µm. The temperature was found to have a negligible effect on the Ni–B micro-probes. These results...
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  • mechanical 机械的
  • testing 测试
  • probe 探针
  • pitch 俯仰
  • properties 道具
  • based 基于
  • enhanced 增强